技術(shù)文章
中國國家電子級(jí)超純水GB/TII446.1-1997標(biāo)準(zhǔn)
閱讀:3131 發(fā)布時(shí)間:2015-9-15中國國家電子級(jí)超純水GB/TII446.1-1997標(biāo)準(zhǔn)
指標(biāo)\級(jí)別 | EW-Ⅰ | EW-Ⅱ | EW-Ⅲ | EW-Ⅳ |
電阻率 MΩ,cm(25℃) | 18以上,(95%時(shí)間)不低于17 | 15,(95%時(shí)間)不低于13 | 12.0 | 0.5 |
全硅,zui大值,μg/L | 2 | 10 | 50 | 1000 |
>1μm微粒數(shù),zui大值,個(gè)/mL | 0.1 | 5 | 10 | 500 |
細(xì)菌個(gè)數(shù),zui大值,個(gè)/mL | 0.01 | 0.1 | 10 | 100 |
銅,zui大值,μg/L | 0.2 | 1 | 2 | 500 |
鋅,zui大值,μg/L | 0.2 | 1 | 5 | 500 |
鎳,zui大值,μg/L | 0.1 | 1 | 2 | 500 |
鈉,zui大值,μg/L | 0.5 | 2 | 5 | 1000 |
鉀,zui大值,μg/L | 0.5 | 2 | 5 | 500 |
氯,zui大值,μg/L | 1 | 1 | 10 | 1000 |
硝酸根,zui大值,μg/L | 1 | 1 | 5 | 500 |
磷酸根,zui大值,μg/L | 1 | 1 | 5 | 500 |
硫酸根,zui大值,μg/L | 1 | 1 | 5 | 500 |
總有機(jī)酸,zui大值,μg/L | 20 | 100 | 200 | 1000 |